Rohm and Haas Electronic Materials (NYSE:ROH) and AIXTRON AG announced today that a VaporStation™ central delivery system has been installed and is now operational at the AIXTRON Applications and Demonstration Center.

AIXTRON, a leading manufacturer of metalorganic chemical vapor deposition (MOCVD) equipment, is using the VaporStation central delivery system to deliver trimethylgallium (TMGa) to a CRIUS^® and a Planetary MOCVD system. More MOCVD systems are expected to be connected to the VaporStation central delivery system at its new location in Aachen, Germany.

The VaporStation central delivery system, developed by Rohm and Haas, is designed to deliver TMGa and other metalorganic precursors to multiple MOCVD reactors from a central supply source cabinet using a high-purity carrier gas. This delivery technology improves the economy and the safety of the MOCVD process through the reduction of cylinder changes and handling. It enables manufacturers of compound semiconductors, such as LEDs, solar cells and laser diodes, to further reduce production costs. In the case of the LED industry, the VaporStation central delivery system will help manufacturers to more quickly reach cost parity with conventional general lighting production.

"As the market leader for MOCVD equipment, we are constantly looking for ways to improve the technology and reduce running costs for our customers" says Johannes Kaeppeler, vice president of Technology for AIXTRON. "The delivery of TMGa from a central unit reduces the foot print of our systems, and this is an important consideration for our customers using expensive clean room space.

"The performance of the system met with our expectations right from the first run," Kaeppeler continues. "Without a single calibration run, gallium nitride (GaN) films made using the central delivery system could not be distinguished from the films made using the conventional onboard delivery method."

"Providing a simpler, more efficient alternative for customers is a top priority for us, and AIXTRON clearly shares this vision of the future,” said Joe Reiser, general manager for Rohm and Haas Electronic Materials’ Metalorganics business. “Delivery to multiple reactors using large-scale cylinders with 20 kg or more of content eliminates a number of costly inefficiencies, such as calibration runs, cylinder change outs and residual “heels” associated with on board cylinders.