GLOUCESTER, MA -- (Marketwire) -- 08/19/09 -- Varian Semiconductor Equipment Associates,
Inc. (NASDAQ: VSEA) today announced successful multiple installations of
PTC II, its latest product upgrade supporting the development and
implementation of advanced damage engineering capability. PTC II (Process
Temperature Control) is a patent pending combination of proprietary
hardware, software and process integration expertise.
In development for several years, PTC II enables chip makers to accurately
and quickly control wafer temperature during the ion implant process. This
results in novel crystal damage engineering capability that is essential to
achieving device targets at advanced technology nodes.
The positive impact of implant temperature tuning to crystal damage
formation has long been demonstrated in R&D labs. Varian is the first
company to successfully bring a robust production-ready solution to the
market. At sub 45nm logic and memory nodes, device characteristics can
degrade significantly when using traditional approaches for device tuning.
PTC II provides Varian customers with enabling capability that allows them
to meet their line-width shrink goals with improved device performance.
Tony Renau, Chief Technology Officer at Varian, said, "Varian continues to
invest heavily in R&D to enable unique solutions for customer problems.
We've developed a proprietary cryogenic system to control process
temperature without affecting the integrity of the high vacuum environment
of the beamline or the particle performance of the VIISta platform. The PTC
II design is based on Varian's common platform philosophy setting the stage
for extendability across the implant application space."
"PTC II process control hardware advantage provides our applications group
with the ability to help our customers design and develop new processes
that provide extendable transistor performance," said Bob Perlmutter,
Executive Vice President, Implant Business Units. "By year-end, we will
have installed PTC II systems worldwide at logic, foundry and memory fabs.
The launching of PTC II into the marketplace is another example of how
Varian is driving growth with a continued emphasis on enabling solutions
for device performance and yield."
Varian's production-ready PTC II solution is field upgradeable.
About Varian Semiconductor
Varian Semiconductor Equipment Associates is the leading supplier of ion
implant equipment to semiconductor manufacturers, enabling them to pack
more, higher performing transistors into computer chips that are
revolutionizing the electronics industry. Varian Semiconductor's products
are used by chip manufacturers worldwide to produce high-performance
semiconductor devices.